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Journal of Micromechanics and Microengineering latest papers
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Journal of Micromechanics and Microengineering is a leading journal in its field, covering all aspects of microelectromechanichal systems, devices and structures as well as micromechanics, microengineering and microfabrication. The journal publishes key research from around the world and is essential reading for all MEMS researchers.
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Low-temperature bonding of poly-(methyl methacrylate) microfluidic devices under an ultrasonic field
Author(s): S W Li, J H Xu, Y J Wang, Y C Lu and G S Luo
Affiliation(s): The State Key Lab of Chemical Engineering, Department of Chemical Engineering, Tsinghua University, Beijing 100084, People's Republic of China
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A wet abrasive blasting process for smooth micromachining of glass by ductile-mode removal
Author(s): Takashi Mineta, Takehisa Takada, Eiji Makino, Takahiro Kawashima and Takayuki Shibata
Affiliation(s): Faculty of Science and Technology, Hirosaki University, 3 Bunkyo-cho, Hirosaki, Hirosaki 036-8561, Japan; Department of Production Systems Engineering, Toyohashi University of Technology, Toyohashi 441-8580, Japan
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Boron impurity at the Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices
Author(s): A Nafari, D Karlen, C Rusu, K Svensson and P Enoksson
Affiliation(s): MC2, Chalmers University of Technology, SE-412 58, Gothenburg, Sweden; Nanofactory Instruments, SE-412 96, Gothenburg, Sweden; Imego Institute, SE-411 33, Gothenburg, Sweden; Department of Physics, Karlstad University, SE-651 88, Karlstad, Sweden
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Fabrication of a micrometer Ni?Cu alloy column coupled with a Cu micro-column for thermal measurement
Author(s): J C Lin, T K Chang, J H Yang, J H Jeng, D L Lee and S B Jiang
Affiliation(s): Department of Mechanical Engineering, National Central University, No. 300, Jhongda Rd, Jhongli City, Taoyuan County 320, Taiwan, Republic of China; Institute of Materials Science and Engineering, National Central University, No. 300, Jhongda Rd, Jhongli City, Taoyuan County 320, Taiwan, Republic of China; Institute of Opto-Mechatronics, National Central University, No. 300, Jhongda Rd, Jhongli City, Taoyuan County 320, Taiwan, Republic of China
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Investigation of ink transfer in a roller-reversal imprint process
Author(s): Weitao Jiang, Hongzhong Liu, Yucheng Ding, Yiping Tang, Yongsheng Shi, Lei Yin and Bingheng Lu
Affiliation(s): State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China
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